Damage evolution and surface defect segregation in low-energy ion-implanted silicon
- Bedrossian, P.J.
- Caturla, M.-J.
- Diaz De La Rubia, T.
ISSN: 0003-6951
Année de publication: 1997
Volumen: 70
Número: 2
Pages: 176-178
Type: Article
Revue:
Applied Physics Letters