Damage evolution and surface defect segregation in low-energy ion-implanted silicon

  1. Bedrossian, P.J.
  2. Caturla, M.-J.
  3. Diaz De La Rubia, T.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 1997

Volume: 70

Issue: 2

Pages: 176-178

Type: Article

DOI: 10.1063/1.118349 GOOGLE SCHOLAR
Data source: Scopus