Slowing down and thermalization of sputtered particle fluxes: Energy distributions

  1. Gras-Marti, A.
  2. Valles-Abarca, J.A.
Revue:
Journal of Applied Physics

ISSN: 0021-8979

Année de publication: 1983

Volumen: 54

Número: 2

Pages: 1071-1075

Type: Article

DOI: 10.1063/1.332113 GOOGLE SCHOLAR

Objectifs de Développement Durable