Slowing down and thermalization of sputtered particle fluxes: Energy distributions

  1. Gras-Marti, A.
  2. Valles-Abarca, J.A.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 1983

Volume: 54

Issue: 2

Pages: 1071-1075

Type: Article

DOI: 10.1063/1.332113 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus