Modelling of glow discharge sputtering systems: Theory of the cathode fall region

  1. Gras-Marti, A.
  2. Abril, I.
  3. Valles-Abarca, J.A.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 1985

Volumen: 124

Número: 1

Pages: 59-65

Type: Article

DOI: 10.1016/0040-6090(85)90029-X GOOGLE SCHOLAR
La source de données: Scopus