Modelling of glow discharge sputtering systems: Theory of the cathode fall region
ISSN: 0040-6090
Year of publication: 1985
Volume: 124
Issue: 1
Pages: 59-65
Type: Article
ISSN: 0040-6090
Year of publication: 1985
Volume: 124
Issue: 1
Pages: 59-65
Type: Article