Alacant: Modeling of glow discharge sputtering systems

  1. Abril, I.
Journal:
Computer Physics Communications

ISSN: 0010-4655

Year of publication: 1988

Volume: 51

Issue: 3

Pages: 413-422

Type: Article

DOI: 10.1016/0010-4655(88)90154-3 GOOGLE SCHOLAR
Data source: Scopus