Defect diffusion during annealing of low-energy ion-implanted silicon
- Bedrossian, P.J.
- Caturla, M.-J.
- De La Rubia, T.Diaz
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 1997
Volume: 439
Pages: 53-58
Type: Conference paper