Modeling of ion implantation and diffusion in Si

  1. Caturla, M.-J.
  2. Diaz De La Rubia, T.
  3. Bedrossian, P.J.
Book Series:
Materials Science Forum

ISSN: 1662-9752,  0255-5476

Year of publication: 1997

Volume: 248-249

Pages: 41-48

Type: Article

DOI: 10.4028/WWW.SCIENTIFIC.NET/MSF.248-249.41 GOOGLE SCHOLAR
Data source: Scopus