Radial profile of energetic particles bombarding the substrate in a glow discharge
ISSN: 0734-2101
Année de publication: 1999
Volumen: 17
Número: 2
Pages: 528-534
Type: Article
ISSN: 0734-2101
Année de publication: 1999
Volumen: 17
Número: 2
Pages: 528-534
Type: Article