Radial profile of energetic particles bombarding the substrate in a glow discharge

  1. Moreno-Marín, J.C.
  2. Abril, I.
  3. Garcia-Molina, R.
Journal:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 0734-2101

Year of publication: 1999

Volume: 17

Issue: 2

Pages: 528-534

Type: Article

DOI: 10.1116/1.581614 GOOGLE SCHOLAR
Data source: Scopus