Diffusion and activation of dopants in silicon and advanced silicon-based materials

1. Pichler, P.
2. Ortiz, C.J.
3. Colombeau, B.
4. Cowern, N.E.B.
5. Lampin, E.
6. Uppal, S.
7. Karunaratne, M.S.A.
8. Bonar, J.M.
9. Willoughby, A.F.W.
10. Claverie, A.
11. Cristiano, F.
12. Lerch, W.
13. Paul, S.