Defect diffusion during annealing of low-energy ion-implanted silicon
- Bedrossian, P.J.
- Caturla, M.-J.
- Diaz de la Rubia, T.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 1996
Volume: 438
Pages: 715-720
Type: Conference paper