Application of dichromated gelatin for dry developed lithographic techniques on GaAs

  1. Villalvilla, J.M.
Revista:
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN: 1071-1023

Ano de publicación: 1999

Volume: 17

Número: 3

Páxinas: 1085-1086

Tipo: Artigo

DOI: 10.1116/1.590698 GOOGLE SCHOLAR
Fonte de datos: Scopus