Application of dichromated gelatin for dry developed lithographic techniques on GaAs

  1. Villalvilla, J.M.
Journal:
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN: 1071-1023

Year of publication: 1999

Volume: 17

Issue: 3

Pages: 1085-1086

Type: Article

DOI: 10.1116/1.590698 GOOGLE SCHOLAR
Data source: Scopus