Application of dichromated gelatin for dry developed lithographic techniques on GaAs

  1. Villalvilla, J.M.
Aldizkaria:
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN: 1071-1023

Argitalpen urtea: 1999

Alea: 17

Zenbakia: 3

Orrialdeak: 1085-1086

Mota: Artikulua

DOI: 10.1116/1.590698 GOOGLE SCHOLAR
Datuen iturria: Scopus