Distortion of depth profiles during ion bombardment II. Mixing mechanisms

  1. Gras-Marti, A.
  2. Sigmund, P.
Aldizkaria:
Nuclear Instruments and Methods

ISSN: 0029-554X

Argitalpen urtea: 1981

Alea: 180

Zenbakia: 1

Orrialdeak: 211-219

Mota: Artikulua

DOI: 10.1016/0029-554X(81)90032-X GOOGLE SCHOLAR