Distortion of depth profiles during ion bombardment II. Mixing mechanisms

  1. Gras-Marti, A.
  2. Sigmund, P.
Journal:
Nuclear Instruments and Methods

ISSN: 0029-554X

Year of publication: 1981

Volume: 180

Issue: 1

Pages: 211-219

Type: Article

DOI: 10.1016/0029-554X(81)90032-X GOOGLE SCHOLAR
Data source: Scopus