RF magnetron sputtering of gallium nitride (GaN) on sapphire substrate
- Șerban, A.B.
- Ene, V.L.
- Gheorghiu, C.C.
- Balabanski, D.
- Andronescu, E.
- Leca, V.
ISSN: 2286-3680, 1454-2331
Année de publication: 2019
Volumen: 81
Número: 3
Pages: 11-18
Type: Article