RF magnetron sputtering of gallium nitride (GaN) on sapphire substrate

  1. Șerban, A.B.
  2. Ene, V.L.
  3. Gheorghiu, C.C.
  4. Balabanski, D.
  5. Andronescu, E.
  6. Leca, V.
Journal:
UPB Scientific Bulletin, Series B: Chemistry and Materials Science

ISSN: 2286-3680,  1454-2331

Year of publication: 2019

Volume: 81

Issue: 3

Pages: 11-18

Type: Article

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Data source: Scopus