RF magnetron sputtering of gallium nitride (GaN) on sapphire substrate

  1. Șerban, A.B.
  2. Ene, V.L.
  3. Gheorghiu, C.C.
  4. Balabanski, D.
  5. Andronescu, E.
  6. Leca, V.
Aldizkaria:
UPB Scientific Bulletin, Series B: Chemistry and Materials Science

ISSN: 2286-3680 1454-2331

Argitalpen urtea: 2019

Alea: 81

Zenbakia: 3

Orrialdeak: 11-18

Mota: Artikulua