Evolution towards thermalization, and diffusion, of sputtered particle fluxes: Spatial profiles

  1. Valles-Abarca, J.A.
  2. Gras-Marti, A.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 1984

Volume: 55

Issue: 5

Pages: 1370-1378

Type: Article

DOI: 10.1063/1.333227 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus