The influence of pressure on the operation of glow-discharge sputtering systems

  1. Abril, I.
  2. Gras-Marti, A.
  3. Valles-Abarca, J.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1987

Volume: 37

Issue: 5-6

Pages: 391-394

Type: Article

DOI: 10.1016/0042-207X(87)90318-6 GOOGLE SCHOLAR
Data source: Scopus