Depth resolution in depth profiling of marker layers by energetic ion bombardment

  1. Caturla, M.J.
  2. Abril, I.
  3. Jiménez-Rodríguez, J.J.
Revue:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Année de publication: 1995

Volumen: 95

Número: 1

Pages: 91-96

Type: Article

DOI: 10.1016/0168-583X(94)00319-X GOOGLE SCHOLAR
La source de données: Scopus