Depth resolution in depth profiling of marker layers by energetic ion bombardment

  1. Caturla, M.J.
  2. Abril, I.
  3. Jiménez-Rodríguez, J.J.
Aldizkaria:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Argitalpen urtea: 1995

Alea: 95

Zenbakia: 1

Orrialdeak: 91-96

Mota: Artikulua

DOI: 10.1016/0168-583X(94)00319-X GOOGLE SCHOLAR
Datuen iturria: Scopus