Gallium arsenide etching using ion beams from hydrogen/methane mixtures

  1. Villalvilla, J.M.
  2. Santos, C.
  3. Vallés-Abarca, J.A.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1996

Volume: 47

Issue: 1

Pages: 39-44

Type: Article

DOI: 10.1016/0042-207X(95)00194-8 GOOGLE SCHOLAR
Data source: Scopus