Spatial profile of deposited energy by the sputtered flux in a glow discharge
- Moreno-Marín, J.C.
- Abril, I.
- Garcia-Molina, R.
- Pérez-Martín, A.M.C.
- Jiménez-Rodríguez, J.J.
ISSN: 0042-207X
Année de publication: 1997
Volumen: 48
Número: 7-9
Pages: 685-688
Type: Article