Spatial profile of deposited energy by the sputtered flux in a glow discharge

  1. Moreno-Marín, J.C.
  2. Abril, I.
  3. Garcia-Molina, R.
  4. Pérez-Martín, A.M.C.
  5. Jiménez-Rodríguez, J.J.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1997

Volume: 48

Issue: 7-9

Pages: 685-688

Type: Article

DOI: 10.1016/S0042-207X(97)00056-0 GOOGLE SCHOLAR
Data source: Scopus