Defect diffusion during annealing of low-energy ion-implanted silicon

  1. Bedrossian, PJ
  2. Caturla, MJ
  3. DelaRubia, TD
Colección de libros:
MATERIALS MODIFICATION AND SYNTHESIS BY ION BEAM PROCESSING
  1. Alexander, DE (coord.)
  2. Cheung, NW (coord.)
  3. Park, B (coord.)
  4. Skorupa, W (coord.)

ISSN: 0272-9172

ISBN: 1-55899-342-8

Ano de publicación: 1997

Volume: 438

Páxinas: 715-720

Congreso: Symposium on Materials Modification and Synthesis by Ion Beam Processing, at the 1996 MRS Fall Meeting

Tipo: Achega congreso

GOOGLE SCHOLAR
Fonte de datos: WoS