Defect diffusion during annealing of low-energy ion-implanted silicon

  1. Bedrossian, PJ
  2. Caturla, MJ
  3. DelaRubia, TD
Collection de livres:
MATERIALS MODIFICATION AND SYNTHESIS BY ION BEAM PROCESSING
  1. Alexander, DE (coord.)
  2. Cheung, NW (coord.)
  3. Park, B (coord.)
  4. Skorupa, W (coord.)

ISSN: 0272-9172

ISBN: 1-55899-342-8

Année de publication: 1997

Volumen: 438

Pages: 715-720

Congreso: Symposium on Materials Modification and Synthesis by Ion Beam Processing, at the 1996 MRS Fall Meeting

Type: Communication dans un congrès

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La source de données: WoS