Increasing the Stability of Isolated and Dense High-Aspect-Ratio Nanopillars Fabricated Using UV-Nanoimprint Lithography
- Haslinger, M.J.
- Maier, O.S.
- Pribyl, M.
- Taus, P.
- Kopp, S.
- Wanzenboeck, H.D.
- Hingerl, K.
- Muehlberger, M.M.
- Guillén, E.
Journal:
Nanomaterials
ISSN: 2079-4991
Year of publication: 2023
Volume: 13
Issue: 9
Type: Article