Energy and momentum transport by sputtered and reflected streams in a glow discharge
- Gras-Marti, A.
- Valles-Abarca, J.A.
- Bensaoula, A.
ISSN: 1520-8559, 0734-2101
Argitalpen urtea: 1987
Alea: 5
Zenbakia: 4
Orrialdeak: 2217-2221
Mota: Artikulua
Aldizkaria:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films