Energy and momentum transport by sputtered and reflected streams in a glow discharge
- Gras-Marti, A.
- Valles-Abarca, J.A.
- Bensaoula, A.
ISSN: 1520-8559, 0734-2101
Year of publication: 1987
Volume: 5
Issue: 4
Pages: 2217-2221
Type: Article
Journal:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films