Fabrication of amorphous micro-ring arrays in crystalline silicon using ultrashort laser pulses
- Fuentes-Edfuf, Y.
- Garcia-Lechuga, M.
- Puerto, D.
- Florian, C.
- Garcia-Leis, A.
- Sanchez-Cortes, S.
- Solis, J.
- Siegel, J.
Revue:
Applied Physics Letters
ISSN: 0003-6951
Année de publication: 2017
Volumen: 110
Número: 21
Type: Article