Fabrication of amorphous micro-ring arrays in crystalline silicon using ultrashort laser pulses

  1. Fuentes-Edfuf, Y.
  2. Garcia-Lechuga, M.
  3. Puerto, D.
  4. Florian, C.
  5. Garcia-Leis, A.
  6. Sanchez-Cortes, S.
  7. Solis, J.
  8. Siegel, J.
Aldizkaria:
Applied Physics Letters

ISSN: 0003-6951

Argitalpen urtea: 2017

Alea: 110

Zenbakia: 21

Mota: Artikulua

DOI: 10.1063/1.4984110 GOOGLE SCHOLAR