Lattice kinetic Monte Carlo simulation of epitaxial growth of silicon thin films in H2/SiH4 chemical vapor deposition systems
- Balbuena, J.P.
- Martin-Bragado, I.
Revue:
Thin Solid Films
ISSN: 0040-6090
Année de publication: 2017
Volumen: 634
Pages: 121-133
Type: Article