Lattice kinetic Monte Carlo simulation of epitaxial growth of silicon thin films in H2/SiH4 chemical vapor deposition systems
- Balbuena, J.P.
- Martin-Bragado, I.
Aldizkaria:
Thin Solid Films
ISSN: 0040-6090
Argitalpen urtea: 2017
Alea: 634
Orrialdeak: 121-133
Mota: Artikulua