DEPTH OF DISORDER GENERATION IN LOW ENERGY Ar** plus ION IMPLANTED Si.

  1. Kostic, S.
  2. Begemann, W.
  3. Abril, I.
  4. Armour, D.G.
  5. Carter, G.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1986

Volume: 36

Issue: 11-12

Pages: 1019

Type: Article

GOOGLE SCHOLAR
Data source: Scopus