Disordering and defect production in silicon by keV ion irradiation studied by molecular dynamics
- Caturla, M.J.
- Diaz de la Rubia, T.
- Gilmer, G.H.
ISSN: 0168-583X
Year of publication: 1995
Volume: 106
Issue: 1-4
Pages: 1-8
Type: Article
Journal:
Nuclear Inst. and Methods in Physics Research, B