Disordering and defect production in silicon by keV ion irradiation studied by molecular dynamics

  1. Caturla, M.J.
  2. Diaz de la Rubia, T.
  3. Gilmer, G.H.
Revista:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Any de publicació: 1995

Volum: 106

Número: 1-4

Pàgines: 1-8

Tipus: Article

DOI: 10.1016/0168-583X(95)00668-0 GOOGLE SCHOLAR