Atomic scale modeling of boron transient diffusion in silicon
- Caturla, M.J.
- Lilak, A.
- Johnson, M.D.
- Giles, M.
- Diaz de la Rubia, T.
- Law, M.
- Foad, Mageed
Proceedings:
Proceedings of the International Conference on Ion Implantation Technology
ISBN: 078034538X
Year of publication: 1999
Volume: 2
Pages: 1022-1025
Type: Conference paper