First-principles-based predictive simulations of B diffusion and activation in ion implanted Si
- Theiss, Silva K.
- Caturla, Maria-Jose
- Lenosky, Thomas J.
- Sadigh, Babak
- Diaz de la Rubia, Tomas
- Giles, Martin D.
- Foad, Majeed A.
Aktak:
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
Argitalpen urtea: 2000
Orrialdeak: 18-22
Mota: Artikulua