First-principles-based predictive simulations of B diffusion and activation in ion implanted Si

1. Theiss, Silva K.
2. Caturla, Maria-Jose
3. Lenosky, Thomas J.
4. Sadigh, Babak
5. Diaz de la Rubia, Tomas
6. Giles, Martin D.
7. Foad, Majeed A.