Studies on transport of sputtered atoms in plasma sputter-deposition systems
- Moreno-Marin, J.C.
- Athavale, S.
- Gras-Marti, A.
- Auciello, O.
Proceedings:
91 IEEE Int Conf Plasma Sci
ISBN: 0780301471
Year of publication: 1991
Pages: 122
Type: Conference paper