Energy spectra of reflected and sputtered particles in magnetron deposition systems

  1. Moreno-Marín, J.
  2. Abril, I.
  3. Gras-Marti, A.
  4. Konoplev, V.
  5. Jiménez-Rodriguez, J.
  6. Pérez-Martin, A.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1994

Volume: 45

Issue: 10-11

Pages: 1135-1137

Type: Article

DOI: 10.1016/0042-207X(94)90046-9 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus