Theoretical and experimental study of high fluence germanium implantation into silicon. Contribution of atomic mixing

  1. Gras-Marti, A.
  2. Jimenez-Rodriguez, J.
  3. Peon-Fernandez, J.
  4. Rodriguez-Vidal, M.
  5. Tognetti, N.
  6. Carter, G.
  7. Nobes, M.
  8. Armour, D.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1982

Volume: 32

Issue: 7

Pages: 433-437

Type: Article

DOI: 10.1016/0042-207X(82)94066-0 GOOGLE SCHOLAR
Data source: Scopus