Theoretical and experimental study of high fluence germanium implantation into silicon. Contribution of atomic mixing

1. Gras-Marti, A.
2. Jimenez-Rodriguez, J.
3. Peon-Fernandez, J.
4. Rodriguez-Vidal, M.
5. Tognetti, N.
6. Carter, G.
7. Nobes, M.
8. Armour, D.