Atomic mixing effects on high fluence Ge implantation into Si at 40 keV

  1. Gras-Marti, A.
  2. Jimenez-Rodriguez, J.J.
  3. Peon-Fernandez, J.
  4. Rodriguez-Vidal, M.
  5. Tognetti, N.P.
  6. Carter, G.
  7. Nobes, M.J.
  8. Armour, D.G.
Journal:
Nuclear Instruments and Methods

ISSN: 0029-554X

Year of publication: 1982

Volume: 194

Issue: 1-3

Pages: 449-451

Type: Article

DOI: 10.1016/0029-554X(82)90562-6 GOOGLE SCHOLAR
Data source: Scopus