Fabrication of amorphous-crystalline micro- and nanostructures in silicon using ultrashort laser pulses

1. Fuentes-Edfuf, Y.
2. Garcia-Lechuga, M.
3. Puerto, D.
4. Florian, C.
5. Garcia-Leis, A.
6. Sanchez-Cortes, S.
7. Solis, J.
8. Siegel, J.