Facet development and its influence on depth resolution during sputtering of Si

  1. Carter, G.
  2. Nobes, M.J.
  3. Abril, I.
  4. Garcia‐Molina, R.
Journal:
Surface and Interface Analysis

ISSN: 1096-9918,  0142-2421

Year of publication: 1985

Volume: 7

Issue: 1

Pages: 41-48

Type: Article

DOI: 10.1002/SIA.740070109 GOOGLE SCHOLAR
Data source: Scopus